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Oct 11, 2021 · The EFEM (Equipment Front End Module) is a class 1 mini-environment system designed to maximize productivity of semiconductor processing ...

Fala has been collaborating with leading R & D scientists on the development of EFEMs for nanoscience equipment and processes.

EFEM Full Automation System Configuration. Fully configured customized solution. Fully ... tools for several applications on the same platforms. Yaskawa's EFEM's ...

The user interface was developed using WPF. Software Architecture of EFEM for Semiconductor Wafer Processing. Tools to set up, maintain, operate, ...

They handle products between ultra-clean storage carriers and a variety of processors, measurement, and testing systems within manufacturing tools. Spin/Spray ...

Transform a Sigma W12 wafer bond tester into a fully automated system with a customized EFEM (Equipment Front End Module) wafer handler.

It allows automated loading of 300mm/450mm wafers into metrology and process chucks. Features: Compatible with main software controllers on the market ...